airtech
Airtech Products
 
quick contact
Airtech Equipment Pte.Ltd.
7 Kaki Bukit Place
Eunos TechPark
Singapore 416185
PH  : (65) 6746 7577
Fax : (65) 6747 0327  /  6746 4994
 
Semi-ConductorClean Auto Stocker
It is necessary to automate the process and reduce workers who are the cause of particle generation in order to decrease defective rates and unit price of electronic parts. Our clean Auto Stocker is developed to solve those problems. It can be designed a lot of usage such as Reticle, Mask, Wafer Cassette, Liquid crystal glass cassette, Quarts tube crucible, electronic parts, and for the medicine.
Clean Auto Stocker for wafer cassette
  • Space-saving design, 270 pieces of 8” can be stored
  • Whole storage are kept at class M1.5 (class 1) including handling area.
  • Electrolytic polishing is applied to SUS shelves for flat surfacing
  • Cassette contact partition to let electrostatic escape from the cassettes.
  • Storage and retrieval delivery are fully automated.
  • Synchronization is possible with auto carrying system such as AGV.
  • Heat generation is restrained by cooling coil installed. (optional)
Clean Auto Stocker for large work
  • Give shelves and partition more space for large works such as liquid crystal glass cassette or quartz tube crucible.
  • Whole storage is kept at class M1.5 (class 1).
  • Prevent particle generation from the crane by SS-MAC
  • Storage and retrieval delivery are fully automated.
Clean Auto Stocker for electronics parts
  • Whole storage is kept at class M1.5 (class 1)
  • Storage and retrieval by conveyor is fully automated.
  • Can be done by manual operation
  • Prevent particle generation from the Robot by SS-MAC
Note: Click to enlarge product images
 
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