Semi-Conductor Back
Pass Box
Pass box is a kind of facility, which is located in the partition walls of clean room or adjoining walls to the cleanroom. Its function shall be a buffer area for transferring goods between inside and outside of clean room so that to prevent any disturbance of airflow and air pressure in clean room, which caused by the door opening for goods transferring i.e. it is installed on the wall between two rooms to minimize contamination during transportation of materials. Furthermore, it can reduce the time for operators moving in and out, to prevent any dust coming from the out regions. That’s why there is one interlock guard system controlled the inlet and the outlet of pass box not be opened at the same time, in order to prevent the cross contamination. Air Shower Pass Box Clean Auto Pass box consists of double automatic sliding doors, Hepa Filter, fan and roller conveyor. Transportation of materials can be done automatically by these units from one room to another.